Lithography
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
EMS 1000-1 hot plate |
Electronic Micro Systems Ltd. | 1000-1 | Litho room | John Li <jun.li [at] mcgill.ca>, Peng Yang <peng.yang2 [at] mcgill.ca> |
|
EVG620 |
EVGroup | EVG620 | Litho room | John Li <jun.li [at] mcgill.ca>; mcolisi.dlamini [at] mcgill.ca |
|
IsoTemp Oven |
FisherScientist | Isotemp | Litho room | John Li <jun.li [at] mcgill.ca>;mcolisi.dlamini [at] mcgill.ca |
|
Laurell Spin Coater |
Laurell | WS-400-6NPP-LITE | Litho room | John Li <jun.li [at] mcgill.ca>; mcolisi.dlamini [at] mcgill.ca |
|
OAI Aligner |
Optical Associates Inc. | 200 | Litho room | John Li <jun.li [at] mcgill.ca> |
|
Site Coater |
Site Service | Spinball | Litho room | John Li <jun.li [at] mcgill.ca> |
|
Yes Priming Oven |
Yield Engineering Systems | 310 | Litho room | John Li <jun.li [at] mcgill.ca>; mcolisi.dlamini [at] mcgill.ca |
|
EVG101 Spray Coater |
EVGroup | EVG101 | Litho room | John Li <jun.li [at] mcgill.ca> |
Chemical Vapor Deposition
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
| LPCVD | Tystar | Tystar | Etch/Dep room | John Li <jun.li [at] mcgill.com> |
| PECVD | Applied Materials | P5000 | Etch/Dep room | Peng Yang <peng.yang2 [at] mcgill.ca> |
| Parylene C | Specialty Coating Systems | SCS200 | zhao.lu [at] mcgill.ca | |
| GEMStar-8 |
Physical Vapor Deposition
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
Denton E14 RF/DC Sputter |
Denton Vacuum | Explorer 14 | Etch/Dep room | zhao.lu [at] mcgill.ca |
|
NexDep Ebeam Evaporator |
Angstrom Engineering Inc | NexDep | Etch/Dep room | John Li <jun.li [at] mcgill.ca> ;mcolisi.dlamini [at] mcgill.ca |
|
BJD1800 EBeam Evaporator |
Temescal | bjd1800 | Etch/Dep room | jun.li [at] mcgill.ca; mcolisi.dlamini [at] mcgill.ca |
Dry Etching
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
DSB6000 Oxygen Asher |
Nanoplas | DSB6000 | Etch/Dep room | peng.yang2 [at] mcgill.ca; mcolisi.dlamini [at] mcgill.ca |
|
MERIE P5000 |
Applied Materials | P5000 | Etch/Dep room | Peng Yang <peng.yang2 [at] mcgill.ca> |
|
Tegal SDE110 DRIE |
Tegal | SDE110 | Etch/Dep room | John Li <jun.li [at] mcgill.ca>, Peng Yang <peng.yang2 [at] mcgill.ca |
|
Xactix XeF2 |
Xactix | e2 | Etch/Dep room | Peng.Yang2 [at] mcgill.ca |
Wet Benches
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
HF wet bench |
SIC Bromont | --- | Etch/Dep room | mcolisi.dlamini [at] mcgill.ca; Zhao Lu <zhao.lu [at] mcgill.ca> |
|
Litho wet bench |
SIC Bromont | --- | Litho room | mcolisi.dlamini [at] mcgill.ca; Zhao Lu <zhao.lu [at] mcgill.ca> |
|
Non-HF wet bench |
SIC Bromont | --- | Etch/Dep room | Zhao Lu <zhao.lu [at] mcgill.ca>; mcolisi.dlamini [at] mcgill.ca |
|
Solvent wet bench |
SIC Bromont | --- | Etch/Dep room | Zhao Lu <zhao.lu [at] mcgill.ca>; mcolisi.dlamini [at] mcgill.ca |
|
Silicon Etch Bench |
SIC Bromont | --- | Etch/Dep room | Zhao Lu <zhao.lu [at] mcgill.ca>; mcolisi.dlamini [at] mcgill.ca |
Annealing and Oxidation
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
Disco DAD3240 Dicing saw |
Disco | DAD3240 | Dicing Bonding and Packaging | John Li <jun.li [at] mcgill.ca> |
|
WireBonder |
WestBond | 747677E | Dicing Bonding and Packaging | John Li <jun.li [at] mcgill.ca> |
|
EVG501 |
Tystar EVGroup | 501 | Dicing Bonding and Packaging | John Li <jun.li [at] mcgill.ca> |
Wafers Bonding Sawing and Packaging
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
JIPELEC JetFirst 200 |
Qualiflow Therm | JetFirst 200 | Etch/Dep room | Zhao Lu <zhao.lu [at] mcgill.ca> |
|
Wet Dry Oxidation |
Tystar | Tytan | Ech/Dep room | John Li <jun.li [at] mcgill.ca> |
|
Wet Dry Oxidation2 |
Tystar | Tytan | Ech/Dep room | John Li <jun.li [at] mcgill.ca> |
Direct Wiring
| Equipment | Make | Model | Location | Contact |
|---|---|---|---|---|
|
Electron Beam Lithography MIRA3 XMH |
TESCAN | MIRA3 XMH | Wong Microscopy center | John Li <jun.li [at] mcgill.ca> |