Chemical Engineering : Description of the plasma state and parameters, plasma generation methods, and of the related process control and instrumentation. Electrical breakdown in gases and a series of discharge models are covered. Plasma processing applications such as PVD, PECVD, plasma polymerisation and etching, environmental applications, nanoparticle synthesis, spraying and sterilization are treated.
Terms: Fall 2016
Instructors: Jean-Luc Meunier, Pierre-Luc Girard-Lauriault (Fall)