CHEE 587 Chemical Processing: Electronics Industry (3 credits)

Note: This is the 2016–2017 edition of the eCalendar. Update the year in your browser's URL bar for the most recent version of this page, or click here to jump to the newest eCalendar.

Offered by: Chemical Engineering (Faculty of Engineering)


Chemical Engineering : Introduction to semiconductors and elementary semiconductor devices. Chemical processes and unit operations in the manufacture of microelectronic components with emphasis on silicon chip fabrication, fundamentals of crystal growth, photolithography, deposition of thin films, dopant diffusion, plasma and chemical etching, packaging. Safety and environmental concerns. Sustainability practices in this industry.

Terms: This course is not scheduled for the 2016-2017 academic year.

Instructors: There are no professors associated with this course for the 2016-2017 academic year.