For our MEMS R&D we use

McGill’s Nanotools/Microfab. facilities


  • Agilent E5071C 4.5GHz Vector Network Analyzer
  • Agilent 4440A 26.5GHz Spectrum Analyzer (with phase noise and noise figure personalities)
  • Agilent 83712B 20GHz Signal Generator
  • Agilent N8973A 3GHz Noise Figure Analyzer
  • Agilent 346B Solid State Noise Source
  • Anritsu MG3694B 40GHz Signal Generator
  • Anritsu MG3700A 6GHz Vector Signal Generator
  • Tektronix TDS8000 50GHz Digital Sampling Scope (3 channels)
  • Focus Microwaves Programmable Tuners (Models 718 and 1816)
  • Miteq 1-12GHz Low-Noise Amplifier

vacuum chamber and pump


  • Alcatel AG81 Mini-TASK Vacuum Pump
  • Custom-made 450 cubic-inch vacuum chamber

Microwave and MEMS Probing

  • Cascade RF-1 Microwave Probe Station
  • Cascade 40GHz ACP40-GSG-150, GSG-100, GS-150 Probes (4x)
  • Cascade 40GHz ACP40-SGS-175 Differential Probes (2x)
  • Cascade 101-190 Calibration Substrate